Surface/Interface Engineering of Semiconductors for Device Application

"Often, it may be said that the interface is the device"

----Herbert Kroemer (2000 Nobel Prize for Physics)
Updated: Wednesday, 29.06.2011 Home Members Research Facilities Publications Conference Activity Contact ÖÐÎÄ°æ
 
 
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Thin film growth and preparation equipment
1. Ultra-high Vacuum Radio Frequency Plasma Assisted Molecular Beam Epitaxy System (UHV-RF-MBE)

1. RHEED in-situ

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2. Ultra-high vacuum in situ MBE-STM system (UHV-MBE-STM)

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3. Magnetron Sputtering System (MSS)

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4. Thermal Evaporation System (TES)

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5. Ultra-high Vacuum System (UHV)

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6. High-temperature furnace tube

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Thin films and device testing equipment
1. Ultra-Violet Response Test System (UV-RTS)

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2. Hall test instruments (Ecopia HMS-3000)

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3. A homemade automatic four-probe Hall measurement system (EMO-600,IPCAS)

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